| All-in-one system Performa EU10/EU15/EU20 | Type II water
Performa E10/E15/E20 |
Type I water
Performa U |
|
| Pre-treatment module | YES | YES | NO |
| Main host | YES | YES | YES |
| Pre-guard cartridge A | YES | YES | NO |
| Pre-guard cartridge B | YES | YES | NO |
| Pre purification cartridge A | NO | NO | YES |
| Pre purification cartridge B | NO | NO | YES |
| Two-stage Reverse osmosis | YES | YES | NO |
| EDI module self-developed | YES | YES | NO |
| 60L water tank; stepless water level sensor | YES | YES | NO |
| 254nm UV light of water tank | YES | YES | NO |
| Inlet air filter of water tank 0.2µm | YES | YES | NO |
| Water leakage protection sensor | YES | YES | YES |
| Dual wavelength (254nm & 185nm ) UV-lamp | YES | NO | YES |
| TOC monitoring | YES | NO | YES |
| Ultra purification cartridge A | YES | NO | YES |
| One integrated type I water dispenser arm | YES | YES | YES |
| 1M water piping from main unit to water dispenser arm | YES | YES | YES |
| Point-of-use filter 0.22 µm | YES | YES | YES |
* Optional ultra purification cartridge B special for semiconductor industry that has higher deionization requirements
Characteristics
| All-in-one system Performa EU10/EU15/EU20 | Type II water
Performa E10/E15/E20 |
Type I water
Performa U |
|
| Feed water requirement | |||
| Source | Potable tap water | Type II water/RO | |
| Conductivity | <2000μS/cm | <100μS/cm | |
| TOC | <1ppm | < 50ppb | |
| Hardness* | <450ppm CaCO3 | 0-1ppm | |
| Pressure | 0.1~0.4Mpa (7-72psi) | 0.1~0.4Mpa (7-72psi) | |
| Temperature | 5~45℃ | 5~45℃ | |
| PH | 4-10 | 7/6-8 | |
| Type II high purified water | |||
| Resistivity at 25℃** | 15MΩ.cm; typically 10-15 MΩ.cm | N/A | |
| Conductivity at 25℃** | 0.067μS/cm; typically 0.1μS/cm | ||
| TOC | <30ppb(g/L) | ||
| Particulates with size > 0.22m*** | No particles | ||
| Endotoxin (Pyrogens)*** | <0.001EU/mL | ||
| Bacteria*** | <0.01cfu/mL (<10cfu/L) | ||
| Rnase*** | <1pg/mL | ||
| Dnase*** | <3pg/mL | ||
| Proteases*** | <0.15μg/mL | ||
| RO rejection | ≥99% | ||
| EDI ion rejection | ≥99% | ||
| Production flow rate | 10/15/20 L/H | ||
| Manual control water f low rate | Maximum 2L/min, stepless control of f low rate | ||
| Quantitative water dispense range | 10mL ~ 60L | ||
| Type I ultra purified water | |||
| Resistivity at 25℃ | 18.2 MΩ.cm | N/A | 18.2 MΩ.cm |
| Conductivity at 25℃ | 0.055µS/cm | 0.055µS/cm | |
| TOC | 2ppb(g/L) | 2ppb(g/L) | |
| Particulates with size > 0.22µm | No particles | No particles | |
| Endotoxin (Pyrogens) | <0.001EU/mL | <0.001EU/mL | |
| Bacteria | <0.01cfu/mL (<10cfu/L) | <0.01cfu/mL (<10cfu/L) | |
| Rnase/Dnase | Free | Free | |
| Proteases | <0.15μg/mL | <0.15μg/mL | |
| Manual control water flow rate | Maximum 2L/min, stepless control of flow rate | Maximum 2L/min, stepless control of flow rate | |
| Quantitative water dispense range | 0.01L ~ 60L | 0.01L ~ 60L | |
*If the tap water contains a high rate of calcium ions and magnesium ion which do not meet the requirement, please use salty box to remove part of calcium ions and magnesium ion in advance
**Resistivity typically 10-15MΩ.cm at 25℃, Conductivity typically 0.1μS/cm, at 25℃
***Feed water quality should meet above requirements and purified water through the remote water dispenser with end 0.22µm filter